Leica DM8000 M & DM12000 M Optical inspection systems

Optical inspection systems

DM8000 M & DM12000 MOptical inspection systems

Improve your decision-making for product quality and save time by gaining deeper insights into samples with the DM8000 M and DM12000 M optical inspection systems.

These inspection microscopes offer fast and reliable inspection and analysis of materials like semiconductors and wafers, enabling you to perform quality control and detect defects fast.

Explore benefits
DM8000 M & DM12000 M Optical inspection systems
Reveal hidden details 1

Reveal hidden details

Detect defects and conduct sample overviews quickly for improved analysis and decision-making.

Optimize your way of working 2

Optimize your way of working

Automation and user-friendly operation minimize the need for adjustments, saving valuable time during the inspection process.

Maintain user comfort in a safe and controlled environment 3

Maintain user comfort in a safe and controlled environment

Work in a relaxed working position, ensuring optimal comfort throughout the inspection process, to help increase productivity.

Key feature

Visualize structures and defects quickly

Detect and analyze various structures and defects, such as scratches and contamination, on your samples. Choose from an array of illumination and contrast methods, such as brightfield, darkfield, polarization, differential interference contrast (DIC), fluorescence (Fluo), and infrared (IR), to help you perform inspection quickly and reliably. Improve resolution with ultraviolet (UV) light.

Gain additional surface information with oblique illumination. Combine it with UV to further enhance the contrast.

Find defects faster during fracture analysis with higher contrast supported by the advanced darkfield technique with Plan Fluotar objectives (20x, 50x, and 100x).

Images of a wafer surface acquired with different illumination and contrast methods where contamination can be clearly seen on the right image.

Brightfield illumination
Brightfield illumination
Macro overview
Product feature

Save time with a fast sample overview

Reveal macro defects and structures in material samples quickly using the optional 0.7x Macro objective. The Macro objective offers an approximately 36 mm field of view for fast orientation and efficient screening, saving you time.

For inspection of tall samples with a height above 42 mm, the microscope can be equipped with a "material" incident light axis. When using this axis, the inspection of samples with a small height will need a stage insert.

Brightfield images of a patterned wafer

Product feature

Make fewer adjustments thanks to automation

During inspection and quality control you can save time and reduce errors thanks to automatic adjustments of settings and the intuitive focus operation. With a press of a button, the objective is changed and the illumination and contrast settings are automatically adjusted.

The motorized nosepiece enables fast and comfortable changing of objectives, reducing unnecessary movement to save you time and effort. The sample is better protected from contamination as operators do not need to manually change the objectives.

In addition, the 150x VIS-UV objective allows you to utilize all contrast methods without changing objectives.

Samples are better protected from contamination as operators do not need to use their hands to change the objectives.
No need to recenter the region of interest when changing magnification as the motorized stage keeps the field of view centered.
Product feature

Examine samples with easy operation

The easy and intuitive focus features help you to examine your samples quickly and confidently.

  • For samples with highly reflective surfaces, such as bare wafers, use the focus finder to focus easily and quickly.
  • Use the built-in focus stop with a large vertical range for samples of different heights to protect them from inadvertent damage.
  • Easily switch magnifications without the need to readjust your focus thanks to the parfocal objectives.
Product feature

Work in comfort and increase productivity

The ergonomic design and automated features of the DM8000 M and DM12000 M microscopes enable fatigue-free operation to help you concentrate on your samples, especially during repetitive inspections.

With individually adjustable ergonomic tubes and height-adjustable focus knobs, you can ensure optimal comfort at your workstation during routine inspections and other applications.

With a variable observation angle, an optimized viewing angle can be achieved and the working position can be changed easily multiple times during the day.
The DM8000 M and DM12000 M help to protect sensitive products against damage caused by static electricity as they are made from highly conductive material with surface resistivity.
Product feature

Designed for a safe and controlled environment

The DM8000 M and DM12000 M can be used in clean rooms when you need to inspect mission critical components.

  • Conductive materials with surface resistivity protect your products against electrostatic discharge.
  • The encapsulated motorized nosepiece is designed for demanding environmental conditions.
  • Integrated LED illumination for visible and UV light reduces the risk of contamination.

For clean rooms, the microscope design optimizes airflow around it, ensuring the laminar flow remains undisturbed.

Product feature

DM8000 M / DM12000 M manual

Choose the manual solution for needs requiring

  • Basic inspection of samples on a weekly basis
  • Moderate sample throughput
  • Manual sample positioning
DM8000 M / DM12000 M manual
DM8000 M / DM12000 M motorized
Product feature

DM8000 M / DM12000 M motorized

Choose the motorized solution for needs requiring:

  • Advanced inspection of samples on a daily basis
  • High sample throughput
  • Usage of the same microscope by multiple users
Product feature

Find the solution for your needs

The DM8000 M and DM12000 M microscopes help you ensure efficient and fast inspection of 8-inch and 12-inch samples. Dedicated configurations are available for your specific application needs.

x = included, o = optional, - = not available

Find the solution for your needs
Product media

Product images

DM8000 M & DM12000 M Optical inspection systems

DM8000 M & DM12000 M Optical inspection systems
01 / MEDIADM8000 M & DM12000 M Optical inspection systems
DM8000 M & DM12000 M Optical inspection systems
02 / MEDIADM8000 M & DM12000 M Optical inspection systems
Brightfield illumination
03 / MEDIABrightfield illumination
Overlay of brightfield and fluorescence
04 / MEDIAOverlay of brightfield and fluorescence
Macro overview
05 / MEDIAMacro overview
Higher magnification
06 / MEDIAHigher magnification
DM8000 M & DM12000 M Optical inspection systems
07 / MEDIADM8000 M & DM12000 M Optical inspection systems
Samples are better protected from contamination as operators do not need to use their hands to change the objectives.
08 / MEDIASamples are better protected from contamination as operators do not need to use their hands to change the objectives.
No need to recenter the region of interest when changing magnification as the motorized stage keeps the field of view centered.
09 / MEDIANo need to recenter the region of interest when changing magnification as the motorized stage keeps the field of view centered.
DM8000 M & DM12000 M Optical inspection systems
10 / MEDIADM8000 M & DM12000 M Optical inspection systems
With a variable observation angle, an optimized viewing angle can be achieved and the working position can be changed easily multiple times during the day.
11 / MEDIAWith a variable observation angle, an optimized viewing angle can be achieved and the working position can be changed easily multiple times during the day.
The DM8000 M and DM12000 M help to protect sensitive products against damage caused by static electricity as they are made from highly conductive material with surface resistivity.
12 / MEDIAThe DM8000 M and DM12000 M help to protect sensitive products against damage caused by static electricity as they are made from highly conductive material with surface resistivity.
Product model
DM8000 M & DM12000 M
Product type
Optical inspection systems
Product overview
Improve your decision-making for product quality and save time by gaining deeper insights into samples with the DM8000 M and DM12000 M optical inspection systems,These inspection microscopes offer fast and reliable inspection and analysis of materials like semiconductors and wafers, enabling you to perform quality control and detect defects fast.
Key feature
Reveal hidden details,Optimize your way of working,Maintain user comfort in a safe and controlled environment.
Reveal hidden details
Detect defects and conduct sample overviews quickly for improved analysis and decision-making.

Hangzhou Zhonglai Intelligent Technology Co., Ltd

Co creating the future · Micro world · Extraordinary reflection

  • Contact : Manager Xu
  • Telephone : 19106571799
  • Email : info@zlikeai.com
  • Address : Room 407-18, 4th Floor, Building 8, North Area, Information Harbor Phase 6, No. 617 Jin Er Road, Ningwei Street, Xiaoshan District, Hangzhou City, Zhejiang Province
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